PEC Annual Report Abstracts on Metrology
Fabrication, Distortion, and Metrology of Shrink Fit Electrical Connections by P. Morrissey and J. Eischen
Characterizing Scribing Behavior on Single Crystal Silicon and the Effect of High Pressure Phase Transformation by T. Randall and R.O. Scattergood
Metrology Artifact Design by K. Folkert and T.A. Dow
Ultraform 2D by A. Sohn, K. Garrad and T.A. Dow
Fabrication, Distortion, and Metrology of Shrink Fit Electrical Connections by P. Morrissey and J. Eischen
Lapping Plate Charging by D. Kametz, T.A. Dow and R.O. Scattergood
Scribing Mechanics of Single Crystal Silicon by T. Randall and R. Scattergood
The Polar Profilometer Polaris by A. Sohn and K. Garrard
Lapping Plate Charging by D. Kametz, T.A. Dow and R.O. Scattergood
Distortion of Thin Cylinders by P. Morrissey and J. Eischen
Lapping Plate Charging by D.A. Kametz, J.M. Stevens and T.A. Dow
Bend Effect Due to Mechanical Scribing by B.W. Austin and R.O. Scattergood
Modeling Laser Scribing for Use as a Precision Shaping Technique by B.M. Love and J.W. Eischen
Surface Metrology of Compliant Materials in Fluid by A. Sohn
Design of the Polar Profilometer POLARIS by A. Sohn and K.P. Garrard
POLARIS Control and Data Acquisition by K.P. Garrard and A. Sohn
Scribing of Brittle Materials by B. Austin and R. Scattergood
High Stiffness, Miniature Magnetoelastic Force Sensor by M. Long and T. Dow
Alumina-Titanium Carbide Wafer Distortion by B. Love and J. Eischen
Three-Dimensional Measurement Probe by by E. Marino, T. Dow and A. Sohn
Channeling Effects During Focused Ion Beam Micromaching of Copper by J. Phillips, D. Griffis and P. Russell
Diamond Indenter Shaping Using FIB by K. Jarausch and P. Russell
High Stiffness, Miniature Magnetoelastic Force by M. Long and T. Dow
Three-Dimensional Measurement Probe by E. Marino and T. Dow
Developments in Focused Ion Beam Micromachining of Copper by J. Phillips and P. Russell
Diamond Indenter Shaping Using FIB by K. Jarausch and P. Russell.
Cascaded Stress Amplification Applied to Magnetoelastic Force Sensors by M. Long and T. Dow
Mathematical Model of Machine Tool Geometry by D. Oyewole and T. Dow
Developments in Focused Ion Beam Micromachining (FIBM), Geometrically Enhanced FIBM, and Chemically Enhanced FIBM by J. Phillips and P. Russell
Atomic Force Microscopy Studies of Microstructure and Properties of Self-Assembled Monolayers by J. Santiago, J. Richards and P. Russell
Correlation of Film Stress and the Mechanical Response of Au Thin Films by K. Jarausch, J. Houston and P. Russell
Mathematical Model of Machine Tool Geometry by A. Oyewole and T. Dow
Atomic Force Microscopy Studies of Microstructure and Properties of Self Assembled Monolayers by J. Richards and P. Russell
Friction of Bearing Coatings by A. Santavy and R. Scattergood
Silicon Structures for In-Situ Characterization of Atomic Force Microscope Probe Geometry by K. Jarausch, J. Richards, T. Stark and P. Russell
Machine Tool Metrology by A. Oyewole, G. Moorefield II and T. Dow
Tribology of Diamond-Like Carbon Films by A. Santavy and R. Scattergood
Focused Ion Beam Micromachining (FIBM) and Chemically Enhanced FIBM of Permalloy by D. Thaus and P. Russell
Stability of Silicon Atomic Force Microscope (AFM) Probes and Manipulation of MEMS Structures by K. Jarausch, S. Winder and P. Russell
Characterization of Semiconductor Surfaces with the Near Field Scanning Optical Microscope by A. La Rosa, M. Paesler and H. Hallen
Tribology of Diamond-Like Carbon by A. Santavy and R. Scattergood
Modification of Microelectromechanical Systems (MEMS) Using a Focused Ion Beam by D. Thaus and P. Russell